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0343204 - FZÚ 2011 RIV RO eng J - Journal Article
Novotný, Michal - Bulíř, Jiří - Pokorný, Petr - Bočan, Jiří - Fitl, Přemysl - Lančok, Ján - Musil, Jindřich
Optical emission and mass spectroscopy of plasma processes in reactive DC pulsed magnetron sputtering of aluminium oxide.
Journal of Optoelectronics and Advanced Materials. Roč. 12, č. 3 (2010), 697-700. ISSN 1454-4164. E-ISSN 1841-7132
R&D Projects: GA AV ČR IAA100100718; GA AV ČR KAN400100653; GA ČR GP202/09/P324
Institutional research plan: CEZ:AV0Z10100522
Keywords : reactive magnetron sputtering * alumina * plasma spectroscopy * mass spectroscopy * optical emission spectroscopy
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 0.412, year: 2010
Permanent Link: http://hdl.handle.net/11104/0005901