0335088 - ÚPT 2010 RIV US eng C - Conference Paper (international conference)
Čížek, Martin - Buchta, Zdeněk - Mikel, Břetislav - Lazar, Josef - Číp, OndřejNovel instrumentation for interferometric nanoscale comparator.
Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389). Bellingham: SPIE, 2009, 73982Y: 1-7. ISBN 978-0-8194-7672-2. ISSN 0277-786X.
[Optical Measurement Systems for Industrial Inspection /6./. Munich (DE), 14.06.2009-18.06.2009]
R&D Projects: GA ČR GA102/09/1276; GA MŠMT(CZ) LC06007; GA MŠMT 2C06012; GA MPO 2A-1TP1/127; GA MPO FT-TA3/133; GA MPO 2A-3TP1/113; GA ČR GA102/07/1179; GA ČR GP102/09/P630; GA AV ČR KAN311610701
Institutional research plan: CEZ:AV0Z20650511
Keywords : high resolution interferometry * laser comparator * precision displacement sensors
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0179660
