0335019 - FZÚ 2010 RIV DE eng J - Journal Article
Čada, Martin - Virostko, Petr - Kment, Štěpán - Hubička, ZdeněkComparative study of total power density at a substrate in pulsed DC magnetron and hollow-cathode plasma jet sputtering systems.
[Porovnávací studie celkové výkonové hustoty na substrát v pulzním DC magnetronovém výboji a v plazma-jetu s dutou katodou.]
Plasma Processes and Polymers. Roč. 6, S1 (2009), S247-S252. ISSN 1612-8850. E-ISSN 1612-8869.
[International Conference on Plasma Surface Engineering /11./. Garmisch Partenkirchen, 15.09.2008-19.09.2008]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR KJB100100707; GA AV ČR KJB100100805; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : calorimeter probe * floating substrate * magnetron * plasma jet * pulsed discharge
Subject RIV: BH - Optics, Masers, Lasers
Impact factor: 4.037, year: 2009
Permanent Link: http://hdl.handle.net/11104/0179607
