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0324115 - FZÚ 2009 RIV CZ eng C - Conference Paper (international conference)
Hubička, Zdeněk - Virostko, Petr - Olejníček, Jiří - Deyneka, Alexander - Adámek, Petr - Valvoda, V. - Jastrabík, Lubomír - Šícha, Miloš - Tichý, M.
Deposition of Ba_xSr_1-xTiO₃ thin films by double RF hollow cathode plasma jet system.
[Depozice tenkých vrstev Ba_xSr_1-xTiO₃ pomocí dvoutryskového RF plazmatického systému s efektem duté katody.]
International conference on phenomena in ionized gases- ICPIG /28./. Praha: Institute of Plasma Physics AS CR, 2007 - (Schmidt, J.; Šimek, M.; Pekárek, S.; Prukner, V.), s. 765-768. ISBN 978-80-87026-01-4.
[International conference on phenomena in ionized gases - ICPIG /28./. Praha (CZ), 15.07.2007-20.07.2007]
R&D Projects: GA AV ČR KAN301370701; GA AV ČR 1QS100100563; GA MŠMT(CZ) 1M06002
Institutional research plan: CEZ:AV0Z10100522
Keywords : BSTO * thin films * plasma deposition * hollow cathode * plasma jet
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0171898