0304116 - URE-Y 20030005 RIV US eng C - Conference Paper (international conference)
Aubrecht, Ivo - Miler, Miroslav - Pala, JanPhase elements by means of photo-lithographic system employing a spatial light modulator.
Bellingham: SPIE The International Society for Optical Engineering, 2003. Proceedings of SPIE., 5036. ISBN 0-8194-4837-0. ISSN 0277-786X. In:
Photonics, Devices and Systems II. - (Hrabovský, M.; Senderáková, D.; Tománek, P.), s. 63-66
[Photonics Prague'2002 /4./. Prague (CZ), 26.05.2002-29.05.2002 (K)]
R&D Projects: GA ČR GA202/01/0428
Institutional research plan: CEZ:AV0Z2067918
Keywords : spatial light modulators * photolitography * photoresists
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0114257
