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0302441 - URE-Y 930050 US eng C - Conference Paper (international conference)
Walachová, Jarmila - Šroubek, Zdeněk - Zelinka, Jiří - Kot, Miroslav - Pittroff, W.
From InP/GaInAsP interface study to nanometer range heterostructure detection with contact probe profiling method.
Research Triangle Park: Microelectronics Centre of North Caroline, 1993. In: Proceedings of the Second International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors. - (Subrahmanyan, R.), s. 103-107
[International Workshop /2./. Research Triangle Park (US), 23.03.1993-25.03.1993]
Institutional research plan: Ústavní úkol č. 0130
Keywords : impurity distribution * semiconductor junctions * measurement
Permanent Link: http://hdl.handle.net/11104/0112860