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0205568 - UPT-D 20020118 RIV NL eng J - Journal Article
Müllerová, Ilona - El-Gomati, M. - Frank, Luděk
Imaging of the boron doping in silicon using low energy SEM.
Ultramicroscopy. Roč. 93, 3/4 (2002), s. 223 - 243. ISSN 0304-3991. E-ISSN 1879-2723
R&D Projects: GA AV ČR IAA1065901; GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Keywords : electron and ion microscopes * semiconductor doping
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.772, year: 2002
Permanent Link: http://hdl.handle.net/11104/0101181