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0185886 - UJF-V 20033193 DE eng A - Abstract
Peřina, Vratislav - Macková, Anna - Čížek, J. - Potocký, S. - Houska, J. - Vlček, J.
Composition study of magnetron sputtered superhard Si-B-C-N films by RBS and ERDA.
Book of abstracts of the European Conference on Applications of Surface and Interface Analysis /10./. 2003. s. 334.
[European Conference on Applications of Surface and Interface Analysis /10./. 05.10.2003-10.10.2003, Berlín]
Institutional research plan: CEZ:AV0Z1048901
Keywords : super hard films * magnetron sputtering * RBS
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0082237