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0133852 - FZU-D 20020031 RIV DE eng J - Journal Article
Touš, Jan - Šícha, Miloš - Hubička, Zdeněk - Soukup, Ladislav - Jastrabík, Lubomír - Čada, Martin - Tichý, M.
The radio frequency hollow cathode discharge induced by the RF discharge in the plasma-jet chemical reactor.
Contributions to Plasma Physics. Roč. 42, č. 1 (2002), s. 119-131. ISSN 0863-1042. E-ISSN 1521-3986
R&D Projects: GA ČR GA202/00/1592
Institutional research plan: CEZ:AV0Z1010914
Keywords : hollow cathode discharge * supersonic plasma jet * sputtering
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 0.804, year: 2002
Permanent Link: http://hdl.handle.net/11104/0031806