0092589 - ÚPT 2008 RIV CZ eng C - Conference Paper (international conference)
Matějka, František - Horáček, Miroslav - Lencová, Bohumila - Kolařík, VladimírReducing the Size of a Rectangular-Shaped Electron Beam in E-Beam Writing System.
[Zmenšení rozměru pravoúhlého elektronového svazku v elektronovém litografu.]
Proceedings of the 8th Multinational Congress on Microscopy. Prague: Czechoslovak Microscopy Society, 2007 - (Nebesářová, J.; Hozák, P.), s. 87-88. ISBN 978-80-239-9397-4.
[Multinational Congress on Microscopy /8./. Prague (CZ), 17.06.2007-21.06.2007]
R&D Projects: GA ČR GA102/05/2325
Institutional research plan: CEZ:AV0Z20650511
Keywords : rectangular-shaped electron beam * e-beam writing system.
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0152867
