0041223 - FZÚ 2007 RIV US eng C - Conference Paper (international conference)
Kocourek, Tomáš - Jelínek, Miroslav - Studnička, Václav - Kadlec, J.Study of thin TiC
xN
1-x films fabricated by hybrid magnetron-laser deposition.
[Studie tenkých TiC
xN
1-x vrstev vyrobených hybridní magnetron-laserovou depozicí.]
Proceeding of SPIE - Int. Connference on Lasers, Applications, and Technologies 2005. Laser-Assisted Micro- and Nanotechnologies. Bellingham: SPIE, 2005 - (Tománek, P.; Hrabovský, M.; Miler, M.; Senderáková, D.), 61800G/1-61800G/5. Proceedings of SPIE, 6180. ISBN 0-8194-6213-6. ISSN 0277-786X.
[Photonics, Devices, and Systems III. Prague (CZ), 08.06.2005-11.06.2005]
R&D Projects: GA AV ČR(CZ) IAA1010110
Institutional research plan: CEZ:AV0Z10100522
Keywords : laser deposition * magnetron * radiofrequency discharge * TiCN * thin films
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0134763
