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0338222 - FZÚ 2010 US eng A - Abstract
Bulíř, Jiří - Novotný, Michal - Pokorný, Petr - Lančok, Ján - Musil, Jindřich
High rate reactive magnetron sputtering of alumina coatings.
[Vysokorychlostní reaktivní magnetronové naprašování vrstev oxidu hliníku.]
E-MRS 2009 Spring Meeting. Warrendale, PA: MRS, 2009. s. 27-28. ISBN N.
[E-MRS 2009 Spring Meeting. 08.06.2009-12.06.2009, Strasbourg]
Institutional research plan: CEZ:AV0Z10100522
Keywords : reactive pulsed magnetron sputtering * alumina * optical emission spectroscopy * mass spectroscopy
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0182058