Basket

0564937 - FZÚ 2023 RIV DE eng J - Journal Article
Hippler, Rainer - Čada, Martin - Hubička, Zdeněk
Ion energy distribution of plasma ions of a hollow cathode discharge in Ar + N₂ and Ar + O₂ gas mixtures.
European Physical Journal D. Roč. 76, č. 11 (2022), č. článku 214. ISSN 1434-6060. E-ISSN 1434-6079
R&D Projects: GA ČR(CZ) GA21-04477S; GA MŠMT(CZ) EF16_019/0000760
Grant - others:OP VVV - SOLID21(XE) CZ.02.1.01/0.0/0.0/16_019/0000760
Institutional support: RVO:68378271
Keywords : plasma jet * plasma sputtering * ion * oxygen * nitrogen
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 1.8, year: 2022
Method of publishing: Open access
Permanent Link: https://hdl.handle.net/11104/0336517