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0532029 - ÚPT 2021 RIV JO eng J - Journal Article
Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
Automated System for Optical Inspection of Defects in Resist-coated Non-patterned Wafer.
Jordan Journal of Physics. Roč. 13, č. 2 (2020), s. 93-100. ISSN 1994-7607. E-ISSN 1994-7615
R&D Projects: GA MPO FV10618
Institutional support: RVO:68081731
Keywords : optical inspection * resist layer * non-patterned wafer * quality control
OECD category: Automation and control systems
Method of publishing: Open access
http://journals.yu.edu.jo/jjp/JJPIssues/Vol13No2pdf2020/1.html
Permanent Link: http://hdl.handle.net/11104/0310631