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0518278 - ÚFP 2020 RIV US eng C - Conference Paper (international conference)
Koláček, Karel - Frolov, Oleksandr - Schmidt, Jiří - Štraus, Jaroslav - Hoffer, Petr - Stelmashuk, Vitaliy - Lukeš, Petr - Juha, Libor
Aging of Al thin film extreme ultraviolet filters.
Proceedings of SPIE. In: Proceedings of SPIE - The International Society for Optical Engineering. Vol. 11032. Bellingham: SPIE, 2019, Roč. 11035 (2019), č. článku 110350O. ISBN 9781510627307. ISSN 0277-786X.
[Optics Damage and Materials Processing by EUV/X-ray Radiation VII. Praha (CZ), 01.04.2019-03.04.2019]
R&D Projects: GA MŠMT LTT17015
Institutional support: RVO:61389021
Keywords : influence of aging of materials on their XUV characteristics * aging of thin film Al filters * changes of transmission of Al filters in due time
OECD category: Optics (including laser optics and quantum optics)
Permanent Link: http://hdl.handle.net/11104/0303434