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0486976 - FZÚ 2018 RIV GB eng J - Journal Article
Hippler, R. - Čada, Martin - Straňák, V. - Hubička, Zdeněk - Helm, C.A.
Pressure dependence of Ar⁺₂, ArTi⁺, and Ti⁺₂ dimer formation in a magnetron sputtering discharge.
Journal of Physics D-Applied Physics. Roč. 50, č. 44 (2017), s. 1-8, č. článku 445205. ISSN 0022-3727. E-ISSN 1361-6463
R&D Projects: GA ČR GA17-08389S
Institutional support: RVO:68378271
Keywords : magnetron sputtering * ion mass spectrometry * dimer formation * cluster formation
OECD category: Fluids and plasma physics (including surface physics)
Impact factor: 2.373, year: 2017
Permanent Link: http://hdl.handle.net/11104/0281683