Basket

0485656 - ÚPT 2018 RIV CZ eng C - Conference Paper (international conference)
Krátký, Stanislav - Horáček, Miroslav - Meluzín, Petr - Kolařík, Vladimír - Matějka, Milan - Oulehla, Jindřich - Pesic, Z.
Lift-off technology for thick metallic microstructures.
METAL 2017. 26th International Conference on Metallurgy and Materials. Conference Proceedings. Ostrava: TANGER, 2017, s. 1298-1302. ISBN 978-80-87294-79-6.
[METAL 2017: International Conference on Metallurgy and Materials /26./. Brno (CZ), 24.05.2017-26.05.2017]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : lift-off technique * SU-8 photoresist * e-beam lithography * thick layer evaporation
OECD category: Coating and films
Permanent Link: http://hdl.handle.net/11104/0280633