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0466137 - FZÚ 2017 RIV DE eng J - Journal Article
Pokorný, Petr - Mišina, Martin - Novotný, Michal - Fitl, Přemysl - Vlček, Jan - Musil, Jindřich - Marešová, Eva - Bulíř, Jiří - Lančok, Ján
A detailed investigation of radicals and ions in ECR methane/argon microwave discharge.
Plasma Processes and Polymers. Roč. 13, č. 10 (2016), s. 970-980. ISSN 1612-8850. E-ISSN 1612-8869
R&D Projects: GA MŠMT LO1409; GA MŠMT(CZ) LM2011029; GA ČR(CZ) GA14-10279S
Institutional support: RVO:68378271
Keywords : diamond-like carbon * electron cyclotron resonance * mass spectrometry * methane * radicals
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 2.846, year: 2016
Permanent Link: http://hdl.handle.net/11104/0264540