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0463775 - ÚPT 2017 AT eng C - Conference Paper (international conference)
Krátký, Stanislav - Kolařík, Vladimír - Horáček, Miroslav - Meluzín, Petr - Král, Stanislav
Combined e-beam lithography using different energies.
MNE. 42nd International Conference on Micro and Nano Engineering. Viena: Mondial, 2016.
[Interantional Conference on Micro and Nano Engineering /42./. Vienna (AT), 19.09.2016-23.09.2016]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam lithography * absorbed energy density * micro-optical elements
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0262858