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0462140 - FZÚ 2017 RIV US eng J - Journal Article
Stachiv, Ivo - Kuo, Ch.-Y. - Fang, T.-H. - Mortet, Vincent
Simultaneous determination of the residual stress, elastic modulus, density and thickness of ultrathin film utilizing vibrating doubly clamped micro-/nanobeams.
AIP Advances. Roč. 6, č. 4 (2016), 1-8, č. článku 045005. E-ISSN 2158-3226
R&D Projects: GA ČR GC15-13174J
Institutional support: RVO:68378271
Keywords : elastic moduli * thin film structure * vibration resonance * error analysis * materials properties
Subject RIV: BM - Solid Matter Physics ; Magnetism
Impact factor: 1.568, year: 2016
Permanent Link: http://hdl.handle.net/11104/0261836