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0460202 - ÚPT 2017 RIV CZ eng C - Conference Paper (international conference)
Kolařík, Vladimír - Horáček, Miroslav - Matějka, Milan - Krátký, Stanislav - Bok, Jan
Large-area gray-scale structures in e-beam writer versus area current homogeneity and deflection uniformity.
Proceedings of the 15th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments CAS, 2016 - (Mika, F.), s. 26-27. ISBN 978-80-87441-17-6.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /15./. Skalský dvůr (CZ), 29.05.2016-03.06.2016]
R&D Projects: GA TA ČR TE01020233; GA MŠMT(CZ) LO1212; GA MŠMT ED0017/01/01
Institutional support: RVO:68081731
Keywords : e-beam writer * Gaussian e-beam writing system
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
http://www.trends.isibrno.cz/
Permanent Link: http://hdl.handle.net/11104/0260334