0456574 - FZÚ 2016 RIV US eng C - Conference Paper (international conference)
Dzuba, J. - Vanko, G. - Vojs, M. - Rýger, I. - Ižák, Tibor - Jirásek, Vít - Kutiš, V. - Lalinský, T.Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating.
Smart Sensors, Actuators, and MEMS VII; Cyber-Physical Systems. Bellingham: SPIE, 2015 - (SanchezRojas, J.; Brama, R.), "95171I-1"-"95171I-7". Proceedings of SPIE, 9517. ISBN 978-1-62841-639-8. ISSN 0277-786X.
[Smart Sensors, Actuators, and MEMS VII. 1st SPIE Conference on Cyber-Physical Systems. Barcelona (ES), 04.05.2015-06.05.2015]
R&D Projects: GA ČR(CZ) GP14-16549P
Institutional support: RVO:68378271
Keywords : diamond * GaN * membranes * FEM simulations * thermal buckling
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0257101
