0452428 - ÚFP 2016 RIV JP eng C - Conference Paper (international conference)
Frolov, Oleksandr - Koláček, Karel - Schmidt, Jiří - Štraus, Jaroslav - Choukourov, A. - Kasuya, K.EUV nanosecond laser ablation of silicon carbide, tungsten and molybdenum.
Conference proceedings of 9th International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference and 33rd Symposium on Plasma Processing. Meieki, Nakamura-ku, Nagoya: Japan Society of Applied Physics, 2015 - (Toyoda, H.; Vukovic, M.), GT1.00124-GT1.00124. APS Meeting. ISBN 978-4-86348-529-7.
[International Conference on Reactive Plasmas, 68th Gaseous Electronics Conference and 33rd Symposium on Plasma Processing/9./. Honolulu, Hawaii (US), 12.10.2015-16.10.2015]
R&D Projects: GA MŠMT(CZ) LG13029; GA ČR(CZ) GA14-29772S
Institutional support: RVO:61389021
Keywords : EUV laser * laser ablation * tungsten * silicon carbide * molybdenum * surface modification * capillary discharge
Subject RIV: BL - Plasma and Gas Discharge Physics
Permanent Link: http://hdl.handle.net/11104/0253422
