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0439381 - FZÚ 2015 RIV US eng J - Journal Article
Straňák, V. - Hubička, Zdeněk - Čada, Martin - Drache, S. - Tichý, M. - Hippler, R.
Investigation of ionized metal flux in enhanced high power impulse magnetron sputtering discharges.
Journal of Applied Physics. Roč. 115, č. 15 (2014), "153301-1"-"153301-7". ISSN 0021-8979. E-ISSN 1089-7550
R&D Projects: GA MŠMT LH12043
Grant - others:AV ČR(CZ) M100101215
Institutional support: RVO:68378271
Keywords : electron-impact ionization * physical vapor-deposition * cross-sections * plasma parameters * rate coefficients * low-pressure * energy * atoms * films * ions
Subject RIV: BL - Plasma and Gas Discharge Physics
Impact factor: 2.183, year: 2014
Permanent Link: http://hdl.handle.net/11104/0242671