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0397634 - ÚPT 2014 RIV US eng J - Journal Article
Bok, Jan - Kolařík, Vladimír - Horáček, Miroslav - Matějka, Milan - Matějka, František
Modified knife-edge method for current density distribution measurements in e-beam writers.
Journal of Vacuum Science & Technology B. Roč. 31, č. 3 (2013), 031603:1-6. ISSN 1071-1023
R&D Projects: GA MŠMT ED0017/01/01; GA TA ČR TE01020118
Institutional support: RVO:68081731
Keywords : electron-beam * intensity distribution * aperture * detector * profile * size
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Impact factor: 1.358, year: 2013
Permanent Link: http://hdl.handle.net/11104/0225249