0386386 - ÚPT 2013 RIV CZ eng C - Conference Paper (international conference)
Bok, Jan - Schauer, Petr
Quality assessment of scintillation detector in SEM using MFT.
Proceedings of the 13th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, v.v.i, 2012 - (Mika, F.), s. 9-10. ISBN 978-80-87441-07-7.
[International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation /13./. Skalský dvůr (CZ), 25.06.2012-29.06.2012]
R&D Projects: GA ČR GAP102/10/1410; GA MŠMT EE.2.3.20.0103
Institutional support: RVO:68081731
Keywords : scintillation detector in SEM * modulation transfer function * e-beam scanning speed
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0215685