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0374521 - ÚJF 2012 RIV US eng J - Journal Article
Černý, F. - Konvičková, S. - Jech, V. - Hnatowicz, Vladimír
Simple Mathematical Models of High Energy Ion Beam Assisted Deposition Concentration Profiles in Binary Thin Films.
Journal of Nanoscience and Nanotechnology. Roč. 11, č. 10 (2011), s. 8936-8942. ISSN 1533-4880
R&D Projects: GA MŠMT(CZ) LC06041
Institutional research plan: CEZ:AV0Z10480505
Keywords : SILICON-NITRIDE FILMS * ENHANCED DEPOSITION * IBAD-PROCESS
Subject RIV: CF - Physical ; Theoretical Chemistry
Impact factor: 1.563, year: 2011
Permanent Link: http://hdl.handle.net/11104/0207426