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0336791 - ÚPT 2010 GB eng A - Abstract
Mikmeková, Eliška - Janča, J. - Mikmeková, Šárka
Design of experiment in the investigation of dual frequency PECVD process for preparatíon of SiOx fiims in microeletronic applications.
CMMP09 - Condensed Matter and Materials Physics. Warwick: Institute of Physics, 2009. s. 361-362.
[CMMP09 - Condensed Matter and Materials Physics. 15.12.2009-17.12.2009, Warwick]
R&D Projects: GA MPO FR-TI1/118
Institutional research plan: CEZ:AV0Z20650511
Subject RIV: CG - Electrochemistry
Permanent Link: http://hdl.handle.net/11104/0180947