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0304044 - URE-Y 20020127 CZ eng A - Abstract
Aubrecht, Ivo - Miler, Miroslav - Pala, Jan
Phase elements by means of lithographic system emploing a spatial light modulator.
Praha: TECHMARKET, 2002. ISBN 80-86114-46-5. Photonics Prague 2002. Technical Programme & Abstract Booklet. - (Tománek, P.). s. 54
[Photonics Prague'2002 /4./. 26.05.2002-29.05.2002, Prague]
R&D Projects: GA ČR GA202/01/0428
Institutional research plan: CEZ:AV0Z2067918
Keywords : spatial light modulators * photolitography * photoresists
Subject RIV: BH - Optics, Masers, Lasers
Permanent Link: http://hdl.handle.net/11104/0114188