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0205239 - UPT-D 20000015 RIV CZ eng C - Conference Paper (international conference)
Hutař, Otakar - Oral, Martin - Müllerová, Ilona - Frank, Luděk
Dimension measurement in a cathode lens equipped low-energy SEM.
Proceedings of the 12th European Congress on Electron Microscopy. Brno: Czechoslovak Society for Electron Microscopy, 2000 - (Frank, L.; Čiampor, F.), s. I199-I200. ISBN 80-238-5503-4.
[EUREM /12./ - European Congress on Electron Microscopy. Brno (CZ), 09.07.2000-14.07.2000]
R&D Projects: GA AV ČR IBS2065017
Institutional research plan: CEZ:AV0Z2065902
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0100857