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0185884 - UJF-V 20033191 CZ eng A - Abstract
Macková, Anna - Peřina, Vratislav - Strýhal, Z. - Pavlík, J. - Švec, M. - Quédé, A. - Supiot, P. - Borvon, G. - Granier, A. - Raynaud, P.
Combined study by RBS, ERDA and AFM analytical methods of organosilicon films obtained from PECVD and PACVED.
Book of Abstracts of the European Conference on Surface Science. 2003. s. -.
[European Conference on Surface Science. 07.09.2003-12.09.2003, Prague]
Institutional research plan: CEZ:AV0Z1048901
Keywords : organosilocion films * RBS * PECVD
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0082235