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    1.
    0180116 - UFCH-W 960262 RIV GB eng J - Journal Article
    Janovská, Michaela - Bastl, Zdeněk
    IR Laser Induced Decomposition of Tetrakis(dimethylamido)Titanium for Chemical Vapor Deposition of TiNx.
    Infrared Physics and Technology. Roč. 37, - (1996), s. 727-731. ISSN 1350-4495. E-ISSN 1879-0275
    R&D Projects: GA AV ČR IAA440109
    Impact factor: 0.771, year: 1996
    Permanent Link: http://hdl.handle.net/11104/0076825
     
     

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