0324133 - FZÚ 2009 RIV GR eng C - Conference Paper (international conference)
Pokorný, Petr - Novotný, Michal - Bulíř, Jiří - Lančok, Ján - Mišina, Martin - Musil, JindřichStudy of processes in a pulsed magnetron Ar/O
2 plasma by mass spectrometry.
[Studium procesů v pulsním magnetronovém Ar/O
2 plazmatu pomocí hmotnostní spektrometrie.]
35th EPS Conference on Plasma Physics – Contributed papers. Paris: European Physical Society, 2008 - (Lalousis, P.; Moustaizis, S.), P5.142 /1-P5.142 /4. ECA, 32D. ISBN 2-914771-52-5.
[EPS Plasma Physics Conference /35./. Hersonissos (GR), 09.06.2008-13.06.2008]
R&D Projects: GA AV ČR KAN400100653
Institutional research plan: CEZ:AV0Z10100522
Keywords : magnteron sputtering * mass spectrometry * alumina
Subject RIV: BM - Solid Matter Physics ; Magnetism
Permanent Link: http://hdl.handle.net/11104/0171912