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0130345 - FZU-D 940437 RIV NL eng J - Journal Article
Zemek, Josef - Černý, F. - Závětová, Milena - Vaněček, Milan - Železný, Vladimír
Silicon nitride films prepared by high energy ion beam enhanced deposition.
Nuclear Instruments & Methods in Physics Research Section B. Roč. 86, - (1994), s. 293-297. ISSN 0168-583X. E-ISSN 1872-9584
R&D Projects: GA AV ČR IA11032
Impact factor: 1.073, year: 1994
Permanent Link: http://hdl.handle.net/11104/0028478