0109047 - UPT-D 20040048 RIV CZ eng C - Conference Paper (international conference)
Mika, Filip - Frank, LuděkContrast Generation in Low Energy SEM Imaging of Doped Semiconductor.
[Tvorba kontrastu při zobrazení dopovaného polovodiče v nízkoenergiovém REM.]
Proceedings of the 9th International Seminar Recent Trends in Charged Particle Optics and Surface Physics Instrumentation. Brno: Institute of Scientific Instruments AS CR, 2004 - (Müllerová, I.), s. 51-52. ISBN 80-239-3246-2.
[Recent Trends /9./ in Charged Particle Optics and Surface Physics Instrumentation. Skalský Dvůr (CZ), 12.07.2004-16.07.2004]
R&D Projects: GA AV ČR KJB2065301
Keywords : low energy SEM * doped semiconductor
Subject RIV: JA - Electronics ; Optoelectronics, Electrical Engineering
Permanent Link: http://hdl.handle.net/11104/0016159
