Košík

  1. 1.
    0511777 - ÚPT 2020 eng A - Abstrakt
    Knápek, Alexandr - Drozd, Michal - Matějka, Milan - Chlumská, Jana - Král, Stanislav - Kolařík, Vladimír
    Automated inspection of PMMA coating on non-patterned silicon wafers.
    11th International Conference on Instrumental Methods of Analysis: Modern Trends and Applications, IMA-2019. Book of abstracts. -: -, 2019. s. 162.
    [International Conference on Instrumental Methods of Analysis: Modern Trends and Applications /11./. 22.09.2019-25.09.2019, Ioannina]
    Grant CEP: GA MPO FV10618
    Institucionální podpora: RVO:68081731
    Klíčová slova: dielectric surface inspection * resist coated wafer
    Kód oboru RIV: JA - Elektronika a optoelektronika, elektrotechnika
    Obor OECD: Nano-processes (applications on nano-scale)
    Trvalý link: http://hdl.handle.net/11104/0302052