High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm2/min

P. Hauschwitz

doi:10.1117/12.2607607

4 March 2022 High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm²/min

P. Hauschwitz

Proceedings Volume 11989, Laser-based Micro- and Nanoprocessing XVI; 119890O (2022) https://doi.org/10.1117/12.2607607
Event: SPIE LASE, 2022, San Francisco, California, United States

Abstract

Suitable topography of structured surfaces may allow attaining innovative surface properties including friction reduction, superhydrophobicity, self-cleaning, anti-icing and many more. Despite a list of attractive applications of functional surfaces and demonstrated capability of lasers to produce them, the speed of laser micro and nanostructuring is still low with respect to many industry standards. In this work, we introduce a unique combination of high-energy pulsed ultrashort laser system HiLASE PERLA with up-to-date most promising multi-beam micro and nanostructuring technologies able to produce for example more than 40,000 beamlets with productivity over 1900 cm²/min.

Conference Presentation

Citation Download Citation

P. Hauschwitz "High-speed multi-beam nanostructuring techniques at HiLASE with up to 40401 beams and 1910 cm²/min", Proc. SPIE 11989, Laser-based Micro- and Nanoprocessing XVI, 119890O (4 March 2022); https://doi.org/10.1117/12.2607607

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