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Conferences > CLEO_SI > 2023 > STh1N > STh1N.6

Selective laser crystallization of germanium in amorphous Ge/Si multilayer stacks

Vladimir A. Volodin, Yuzhu Cheng, Alexander V. Bulgakov, Yoann Levy, Jiří Beránek, Siva S. Nagisetty, Martin Zukerstein, Alexander A. Popov, and Nadezhda M. Bulgakova

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Abstract

Selective laser crystallization of germanium in multilayer stacks consisting of alternating amorphous nanosized films of silicon and germanium deposited on silicon and glass substrates has been achieved using near- and mid-infrared ultrashort laser pulses.

© 2023 The Author(s)

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