Development of Nb-GaAs based superconductor-semiconductor hybrid platform by combining in situ dc magnetron sputtering and molecular beam epitaxy

Clemens Todt, Sjoerd Telkamp, Filip Krizek, Christian Reichl, Mihai Gabureac, Rüdiger Schott, Erik Cheah, Peng Zeng, Thomas Weber, Arnold Müller, Christof Vockenhuber, Mohsen Bahrami Panah, and Werner Wegscheider

Phys. Rev. Materials 7, 076201 – Published 24 July 2023

Abstract

We present Nb thin films deposited in situ on GaAs by combining molecular beam epitaxy and magnetron sputtering within an ultrahigh vacuum cluster. Nb films deposited at varying power, and a reference film from a commercial system, are compared. The results show clear variation between the in situ and ex situ deposition which we relate to differences in magnetron sputtering conditions and chamber geometry. The Nb films have critical temperatures of around $9 K$ and critical perpendicular magnetic fields of up to $B_{c 2} = 1.4 T$ at $4.2 K$ . From STEM images of the GaAs-Nb interface we find the formation of an amorphous interlayer between the GaAs and the Nb for both the ex situ and in situ deposited material.

Received 20 April 2023
Accepted 8 June 2023

DOI:https://doi.org/10.1103/PhysRevMaterials.7.076201

Physics Subject Headings (PhySH)

Coherence length Microstructure Proximity effect Superconductivity Surface & interfacial phenomena

Body-centered cubic Elemental superconductors III-V semiconductors Solid-solid interfaces Type-II superconductors

BCS theory Drude model Landau-Ginzburg theory Resistivity measurements X-ray diffraction

Condensed Matter, Materials & Applied Physics

Authors & Affiliations

Clemens Todt ^1,2, Sjoerd Telkamp ^1,2, Filip Krizek ^1,2,3,4, Christian Reichl^1,2, Mihai Gabureac^1,2, Rüdiger Schott ^1,2, Erik Cheah^1,2, Peng Zeng ⁵, Thomas Weber ⁶, Arnold Müller⁷, Christof Vockenhuber⁷, Mohsen Bahrami Panah^1,2, and Werner Wegscheider^1,2

¹Solid State Physics Laboratory, ETH Zürich, CH-8093 Zürich, Switzerland
²Quantum Center, ETH Zürich, CH-8093 Zürich, Switzerland
³IBM Research Europe - Zurich, 8803 Rüschlikon, Switzerland
⁴Institute of Physics, Czech Academy of Sciences, 162 00 Prague, Czech Republic
⁵ETH Zürich, The Scientific Center for Optical and Electron Microscopy (ScopeM), CH 8093 Zürich, Switzerland
⁶X-ray Platform, Department of Materials, ETH Zürich, Vladimir-Prelog-Weg 5-10, 8093 Zürich, Switzerland
⁷Laboratory of Ion Beam Physics, ETH Zurich, Schafmattstrasse 20, CH-8093 Zurich, Switzerland.

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Issue

Vol. 7, Iss. 7 — July 2023

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