Abstract
In this paper we report results of study laser plasma plumes created by nanosecond EUV laser pulses at wavelength of 46.9 nm in different materials (Au, Al, Si, Cu). Experiment with attenuation of Al filters for verification of energy of laser pulses was performed. In the ablation plume experiment low energy of laser pulse in the most cases was not sufficient for creation of ablation plumes in Cu, Al and Si. In contrast, higher energy has a greater effect in all the materials.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Rocca, J.J., Shlyaptsev, V.N., Tomasel, F.G., Cortazar, O.D., Hartshorn, D., Chilla, J.L.A.: Demonstration of a discharge pumped table-top soft-x-ray laser. Phys. Rev. Lett. 73, 2192 (1994)
Benware, B.R., Macchietto, C.D., Moreno, C.H., Rocca, J.J.: Demonstration of a high average power tabletop soft x-ray laser. Phys. Rev. Lett. 81, 5804 (1998)
Macchietto, C.D., Benware, B.R., Rocca, J.J.: Generation of millijoule-level soft-x-ray laser pulses at a 4-Hz repetition rate in a highly saturated tabletop capillary discharge amplifier. Opt. Lett. 24, 1115 (1999)
Filevich, J., Kanizay, K., Marconi, M.C., Chilla, J.L.A., Rocca, J.J.: Dense plasma diagnostics with an amplitude-division soft-x-ray laser interferometer based on diffraction gratings. Opt. Lett. 25, 356 (2000)
Brewer, C.A., Brizuela, F., Wachulak, P., Martz, D.H., Chao, W., Anderson, E.H., Attwood, D.T., Vinogradov, A.V., Artyukov, I.A., Ponomareko, A.G., Kondratenko, V.V., Marconi, M.C., Rocca, J.J., Menoni, C.S.: Single shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution. Opt. Lett. 33, 518 (2008)
Brizuela, F., Vaschenko, G., Brewer, C., Grisham, M., Menoni, C.S., Marconi, M.C., Rocca, J.J., Chao, W., Liddle, J.A., Anderson, E.H., Attwood, D.T., Vinogradov, A.V., Artioukov, I.A., Pershyn, Y.P., Kondratenko, V.V.: Reflection mode imaging with nanoscale resolution using a compact extreme ultraviolet laser. Opt. Express. 13, 3983 (2005)
Wachulak, P.W., Marconi, M.C., Bartels, R.A., Menoni, C.S., Rocca, J.J.: Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method. J. Opt. Soc. Am. B25, 1811 (2008)
Wachulak, P.W., Capeluto, M.G., Marconi, M.C., Menoni, C.S., Rocca, J.J.: Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography. Opt. Express. 15, 3465 (2007)
Ottaviano, L., Bussolotti, F., Piperno, S., Rinaldi, M., Santucci, S., Flora, F., Mezi, L., Dunne, P., Kaiser, J., Reale, A., Ritucci, A., Zuppella, P.: Fabrication of metallic micropatterns using table top extreme ultraviolet laser interferometric lithography. Plasma Sources Sci. Technol. 17, 024019 (2008)
Bravo H., Szapiro, B.T., Wachulak, P.W., Marconi, M.C., Chao, W., Anderson, E.H., Menoni, C.S., Rocca, J.J.: Demonstration of nanomachining with focuses extreme ultraviolet laser beams. IEEE J. Sel. Topics. Quantum Elec. 18, 443 (2012)
Kolacek, K., Straus, J., Schmidt, J., Frolov, O., Prukner, V., Shukurov, A., Holy, V., Sobota, J., Fort, T.: Nano-structuring of solid surface by extreme ultraviolet Ar8+ laser. Laser. Part. Beams. 30, 57 (2012)
Vaschenko, G., Etxarri, A.G., Menoni, C.S., Rocca, J.J., Hemberg, O., Bloom, S., Chao, W., Anderson, E.H., Attwood, D.T., Lu, Y., Parkinson, B.: Nanometer scale ablation with a table-top soft x-ray laser. Opt. Lett. 31, 3615 (2006)
Juha, L., Bittner, M., Chvostova, D., Krasa, J., Otcenasek, Z., Prag, A.R., Ullschmied, J., Pientka, Z., Krzywinski, J., Pelka, J.B., Wawro, A., Grisham, M.E., Vaschenko, G., Menoni, C.S., Rocca, J.J.: Ablation of organic polymers by 46.9-nm-laser radiation. Appl. Phys. Lett. 86, 034109 (2005)
Frolov, O., Kolacek, K., Straus, J., Schmidt, J., Prukner, V., Choukourov, A.: Application of EUV optics to surface modification of materials. Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 877707 (2013)
Kolacek, K., Schmidt, J., Straus, J., Frolov, O., Prukner, V., Melich, R., Choukourov, A.: A new method of determination of ablation threshold contour in the spot of focused XUV laser beam of nanosecond duration. Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 87770 N (2013)
Heinbuch, S., Dong, F., Rocca, J.J., Bernstein, E.R.: Single photon ionization of hydrogen bonded clusters with a soft x-ray laser: (HCOOH)x and (HCOOH)y(H2o)z. J. Chem. Phys. 126, 244301 (2007)
Artioukov, I.A., Benware, B.R., Rocca, J.J., Forsythe, M., Uspenskii, Yu. A., Vinogradov, A.V.: Determination of XUV optical constants by reflectometry using a high-repetition rate 46.9-nm laser. IEEE J. Sel. Top. Quantum Electron. 5, 1495 (1999)
Zeng, X., Mao, X.L., Greif, R., Russo, R.E.: Experimental investigation of ablation efficiency and plasma expansion during femtosecond and nanosecond laser ablation of silicon. Appl. Phys. A. 80, 237 (2005)
Harris, T.J.: High-speed photographs of laser-induced heating. IBM J. Res. Develop. 7, 342–345 (1963)
Geohegan, D.B.: Physics and diagnostics of laser ablation plume propagation for high-Tc superconductor film growth. Thin Solid Films. 220, 138–145 (1992)
Kelly, R., Miotello, A., Mele, A., Giardini Giudoni, A.: Plume formation and characterization in laser-surface interactions. Laser Ablation Desorption. 30, 225–289 (1998)
Vertes, A., Gijbels, R., Adams, F.: Solid sampling for analysis by laser ablation. Laser Ionisation Mass Analysis, Chap. 4. Wiley, USA 124, 437–455 (1993)
Hubler, G.K.: Pulsed laser deposition. MRS Bull. vol. XVII, issue 2, 26–29 (1992)
Chrisey, D.B., Hubler, G.K.: Pulsed Laser Deposition of Thin Films, Chap. 3. Wiley, USA, 29–48 (1994)
Gorbunoff, A.: Laser-Assisted Synthesis of Nanostructured Materials, Fortschritt-Berichte VDI 357, VDI Verlag, Germany, 1–229 (2002)
Saenger, K.L.: Angular distribution of ablated material. Pulsed Laser Deposition of Thin Films. Chrisey, D.B., Hubler, G.K. (eds.), Wiley, USA, 199–227 (1994)
Amoruso, S., Bruzzese, R., Spinelli, N., Velotta, R.: Characterization of laser-ablation plasmas. J. Phys. B. 32, 131–172 (1999)
Schou, J.: Laser beam-solid interactions: fundamental aspects. Material Surf Processing by Directed Energy Techniques. 33–62 (2006)
Frolov, O., Kolacek, K., Straus, J., Schmidt, J., Prukner, V., Shukurov, A.: Generation and application of the soft x-ray laser beam based on capillary discharge. J. Phys. Conf. Ser. 511, 012035 (2014)
Straus, J., Kolacek, K., Neufuss, K., Kolman, B., Dubsky, J., Frolov, O., Schmidt, J., Prukner, V.: Modification of alumina-capillary inner-surface by pulse high-current discharge. Czech. J. Phys. 56, B564–B570 (2006)
Schmidt, J., Kolacek, K., Frolov, O., Prukner, V., Straus, J.: Repetitive XUV laser based on the fast capillary discharge: Proc. SPIE 8140, x-ray lasers and coherent x-ray sources: Development and applications IX, SPIE, San Diego, 814015. (2011)
Schmidt, J., Kolacek, K., Straus, J., Prukner, V., Frolov, O., Bohacek, V.: Soft x-ray emission of a fast-capillary-discharge device. Plasma Devices Oper. 13, 105–109 (2005)
Kolacek, K., Schmidt, J., Prukner, V., Frolov, O., Straus, J.: Recent progress in discharge-based soft X-ray lasers at IPP ASci CR: Proc. SPIE 6938, Atomic and Molecular Pulsed Lasers VII, SPIE, Washington, 93805–93805, (2008)
Schmidt, J., Kolacek, K., Frolov, O., Prukner, V., Straus, J., Kaufman, J.: Beam characteristics of CAPEX XUV argon laser: Proc. SPIE 8849, x-ray lasers and coherent x-ray sources: Development and applications X, SPIE, San Diego, 884917 (2013)
Acknowledgment
This work supported by the Czech Science Foundation under Contract GA1429772S and by the Grant Agency of the Ministry of Education, Youth and Sports of the Czech Republic under Contract LG13029.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2016 Springer International Publishing Switzerland
About this paper
Cite this paper
Frolov, O., Kolacek, K., Schmidt, J., Straus, J. (2016). Ablation Plume Induced by Laser Euv Radiation. In: Rocca, J., Menoni, C., Marconi, M. (eds) X-Ray Lasers 2014. Springer Proceedings in Physics, vol 169. Springer, Cham. https://doi.org/10.1007/978-3-319-19521-6_52
Download citation
DOI: https://doi.org/10.1007/978-3-319-19521-6_52
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-19520-9
Online ISBN: 978-3-319-19521-6
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)