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Novel approach to material evaluation of thin surface layers by resonant ultrasound spectroscopy

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, , Citation Michal Landa et al 2010 J. Phys.: Conf. Ser. 214 012045 DOI 10.1088/1742-6596/214/1/012045

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1 Institute of Thermomechanics, ASCR, v.v.i., Dolejškova 5, 18200 Prague 8, Czech Republic

2 Faculty of Nuclear Sciences and Physical Engineering,Czech Technical University in Prague, Trojanova 13, 12000 Prague 2, Czech Republic

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1742-6596/214/1/012045

Abstract

The laser-based modal resonant ultrasound spectroscopy is modified for measurements of thin surface layers on a substrate. This paper describes determination of all in-plane elastic properties of thin layers from small resonant frequency shifts of substrate induced by deposition of the layer.

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10.1088/1742-6596/214/1/012045