Paper
30 April 2009 Back-up technologies for IXO
R. Hudec, J. Sik, M. Lorenc, L. Pina, V. Semencova, M. Mika, A. Inneman, M. Skulinova
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Abstract
We report on recent progress with development of astronomical X-ray optics based on thermally formed glass foils and on bent Si wafers. Experiments with thermal glass forming have continued adding wider range of evaluated and optimized parameters. Recent efforts with Si wafers have been focused on their quality improvements such as flatness and thickness uniformity in order to better meet the requirements of future X-ray astronomy projects applications, as well as on study of their surface quality, defects analysis, and methods for its reproducible measurement. The role of substrates quality in performance of final mirror arrays, as required by large future space X-ray astronomy experiments was also studied.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. Hudec, J. Sik, M. Lorenc, L. Pina, V. Semencova, M. Mika, A. Inneman, and M. Skulinova "Back-up technologies for IXO", Proc. SPIE 7360, EUV and X-Ray Optics: Synergy between Laboratory and Space, 73600L (30 April 2009); https://doi.org/10.1117/12.820815
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Cited by 1 scholarly publication.
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KEYWORDS
Semiconducting wafers

Silicon

Glasses

X-ray optics

Wafer-level optics

Semiconductors

Mirrors

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