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Conductive Gas Sensors Prepared Using PLD

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Nanotechnological Basis for Advanced Sensors

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Abstract

This contribution deals with conductive thin film gas sensors fabricated using laser technology. The principles of the pulsed laser deposition (PLD) technology is explained. Hybrid PLD systems, based on a combination of PLD and magnetron sputtering, PLD and RF discharges, and PLD with two laser targets are also presented. The growing layers can be modified by an ion beam. Organic films can be grown using the cryogenic MAPLE technology. Nanocrystalline and nanocomposite thin films for gas sensors can be deposited. Examples of layer fabrication and testing of layer properties for gas sensors are given.

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Acknowledgements

We thank for grants from the Ministry of Education, Youth and Sports of the Czech Republic MSM6840770012 and the Institutional Research Plan (AVOZ 10100522).

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Authors and Affiliations

  1. Institute of Physics, Academy of Sciences of the Czech Republic, v.v.i., Na Slovance 2, 182 21, Prague 8, Czech Republic

    Miroslav Jelínek & Tomáš Kocourek

  2. Faculty of Biomedical Engineering, Czech Technical University in Prague, náměstí Sítná 3105, 272 201, Kladno, Czech Republic

    Miroslav Jelínek & Tomáš Kocourek

  3. Institute of Chemical Technology in Prague, Technická 5, 166 28, Prague 6, Czech Republic

    Vladimír Myslík, Martin Vrňata, Rudolf Fryček, Přemysl Fitl & Filip Vysloužil

Authors
  1. Miroslav Jelínek
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  2. Vladimír Myslík
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  3. Martin Vrňata
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  4. Rudolf Fryček
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  5. Přemysl Fitl
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  6. Filip Vysloužil
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  7. Tomáš Kocourek
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Corresponding author

Correspondence to Miroslav Jelínek .

Editor information

Editors and Affiliations

  1. , Inst. of Nanostructure Tech. & Analytics, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Johann Peter Reithmaier

  2. , Faculty of Technology and Metallurgy, University "Sts. Cyril and Methodius", Rugjer Boskovic 16, Skopje, 1000, Macedonia

    Perica Paunovic

  3. , Dept. of Mathematics and Natural Science, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Wilhelm Kulisch

  4. , Inst. of Nanostructure Technologies and, University of Kassel, Heinrich-Plett-Str. 40, Kassel, 34132, Germany

    Cyril Popov

  5. Technology & Metallurgy, Dept. Physics, University of Chemical, St. Kliment Ohridski Blvd. 8, Sofia, 1756, Bulgaria

    Plamen Petkov

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Jelínek, M. et al. (2011). Conductive Gas Sensors Prepared Using PLD. In: Reithmaier, J., Paunovic, P., Kulisch, W., Popov, C., Petkov, P. (eds) Nanotechnological Basis for Advanced Sensors. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-0903-4_40

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