Počet záznamů: 1  

Variable shape E-beam writing: proximity effect simulation and correction of binary and relief structures

  1. 1.
    SYSNO0429463
    NázevVariable shape E-beam writing: proximity effect simulation and correction of binary and relief structures
    Tvůrce(i) Urbánek, Michal (UPT-D) RID
    Matějka, Milan (UPT-D) RID, ORCID, SAI
    Kolařík, Vladimír (UPT-D) RID, ORCID, SAI
    Horáček, Miroslav (UPT-D) RID, ORCID, SAI
    Krátký, Stanislav (UPT-D) RID, ORCID, SAI
    Bok, Jan (UPT-D) RID
    Chlumská, Jana (UPT-D) RID, ORCID, SAI
    Mikšík, P. (CZ)
    Vašina, J. (CZ)
    Zdroj.dok. 39th International Conference on Micro and Nano Engineering MNE2013. Book of Abstracts. S. 582. - Cambridge : University of Cambridge, 2013
    Konference MNE2013. International Conference on Micro and Nano Engineering /39./, London, 16.09.2013-19.09.2013
    Druh dok.Abstrakt
    Institucionální podporaUPT-D - RVO:68081731
    Jazyk dok.eng
    Země vyd.GB
    Klíč.slova rectangular shaped beam * proximity effect simulation * binary structures and relief structures
    Trvalý linkhttp://hdl.handle.net/11104/0234576
     
Počet záznamů: 1