Počet záznamů: 1  

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

  1. 1.
    SYSNO ASEP0489644
    Druh ASEPJ - Článek v odborném periodiku
    Zařazení RIVJ - Článek v odborném periodiku
    Poddruh JČlánek ve WOS
    NázevExperimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold
    Tvůrce(i) Makhotkin, I.A. (NL)
    Sobierajski, R. (PL)
    Chalupský, J. (CZ)
    Tiedtke, K. (DE)
    de Vries, G. (NL)
    Stoermer, M. (DE)
    Scholze, F. (DE)
    Siewert, F. (DE)
    van de Kruijs, R.W.E. (NL)
    Louis, E. (NL)
    Jacyna, I. (PL)
    Jurek, M. (PL)
    Klinger, D. (PL)
    Nittler, L. (PL)
    Syryanyy, Y. (PL)
    Juha, Libor (UFP-V)
    Hájková, V. (CZ)
    Vozda, V. (CZ)
    Burian, Tomáš (UFP-V)
    Saksl, K. (SK)
    Faatz, B. (DE)
    Keitel, B. (DE)
    Ploenjes, E. (DE)
    Schreiber, S. (DE)
    Toleikis, S. (DE)
    Loch, R. (DE)
    Hermann, M. (DE)
    Strobel, S. (DE)
    Nienhuys, H.-K. (NL)
    Gwalt, G. (DE)
    Mey, T. (DE)
    Enkisch, H. (DE)
    Zdroj.dok.Journal of Synchrotron Radiation - ISSN 0909-0495
    Roč. 25, č. 1 (2018), s. 77-84
    Poč.str.8 s.
    Forma vydáníOnline - E
    AkceWorkshop on FEL Photon Diagnostics, Instrumentation and Beamline Design (PhotonDiag2017)
    Datum konání01.05.2017 - 03.05.2017
    Místo konáníStanford
    ZeměUS - Spojené státy americké
    Typ akceWRD
    Jazyk dok.eng - angličtina
    Země vyd.DK - Dánsko
    Klíč. slovafree-electron laser induced damage ; EUV optics ; thin films ; FELs
    Vědní obor RIVBL - Fyzika plazmatu a výboje v plynech
    Obor OECDFluids and plasma physics (including surface physics)
    CEPGA14-29772S GA ČR - Grantová agentura ČR
    LG15013 GA MŠk - Ministerstvo školství, mládeže a tělovýchovy
    Institucionální podporaUFP-V - RVO:61389021
    UT WOS000418593300013
    EID SCOPUS85038971075
    DOI10.1107/S1600577517017362
    AnotaceThe durability of grazing-and normal-incidence optical coatings has been experimentally assessed under free-electron laser irradiation at various numbers of pulses up to 16 million shots and various fluence levels below 10% of the single-shot damage threshold. The experiment was performed at FLASH, the Free-electron LASer in Hamburg, using 13.5 nm extreme UV (EUV) radiation with 100 fs pulse duration. Polycrystalline ruthenium and amorphous carbon 50 nm thin films on silicon substrates were tested at total external reflection angles of 20 degrees and 10 degrees grazing incidence, respectively. Mo/Si periodical multilayer structures were tested in the Bragg reflection condition at 16 degrees off-normal angle of incidence. The exposed areas were analysed post-mortem using differential contrast visible light microscopy, EUV reflectivity mapping and scanning X-ray photoelectron spectroscopy. The analysis revealed that Ru and Mo/Si coatings exposed to the highest dose and fluence level show a few per cent drop in their EUV reflectivity, which is explained by EUV-induced oxidation of the surface.
    PracovištěÚstav fyziky plazmatu
    KontaktVladimíra Kebza, kebza@ipp.cas.cz, Tel.: 266 052 975
    Rok sběru2019
Počet záznamů: 1