Počet záznamů: 1

Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering

SYSNO ASEP	0470666
Druh ASEP	J - Článek v odborném periodiku
Zařazení RIV	J - Článek v odborném periodiku
Poddruh J	Článek ve WOS
Název	Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputtering
Tvůrce(i)	Lundin, D. (FR) Čada, Martin (FZU-D)_{RID, ORCID, SAI} Hubička, Zdeněk (FZU-D)_{RID, ORCID, SAI}
Číslo článku	041305
Zdroj.dok.	Journal of Vacuum Science & Technology A : Vacuum, Surfaces and Films. - : AIP Publishing - ISSN 0734-2101 Roč. 34, č. 4 (2016), 1-10
Poč.str.	10 s.
Jazyk dok.	eng - angličtina
Země vyd.	US - Spojené státy americké
Klíč. slova	radiofrequency current ; voltage measurements ; energy-distributions ; sheath voltages ; deposition ; density ; hysteresis ; discharges ; films ; technology
Vědní obor RIV	BL - Fyzika plazmatu a výboje v plynech
CEP	GA15-00863S GA ČR - Grantová agentura ČR
Institucionální podpora	FZU-D - RVO:68378271
UT WOS	000379588000011
EID SCOPUS	84974602716
DOI	10.1116/1.4953033
Anotace	A new planar ion flux probe, based on the Sobolewski method for time-resolved plasma characterization in inherently noisy pulsed plasma discharges, has been developed. The probe was evaluated in a high-power impulse magnetron sputtering (HiPIMS) process, which is a promising ionized physical vapor deposition technique based on pulsed plasma discharges used to engineer thin films with improved properties. Both nonreactive (pure Ar) and reactive (Ar/O-2) deposition processes were investigated using a Ti sputtering target. It was found that the process exhibited a nearly hysteresis-free and stable transition region at the chosen deposition conditions. Time-resolved measurements of the absolute ion flux impinging on the probe placed at the substrate position, as well as of the probe sheath impedance, were recorded in the metal, transition, and compound modes during the HiPIMS pulse. Gradual changes in the measured ion flux were seen when transiting from the metal mode to the compound mode.
Pracoviště	Fyzikální ústav
Kontakt	Kristina Potocká, potocka@fzu.cz, Tel.: 220 318 579
Rok sběru	2017

Počet záznamů: 1