Počet záznamů: 1
Simulations and measurements in scanning electron microscopes at low electron energy
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SYSNO ASEP 0467245 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Simulations and measurements in scanning electron microscopes at low electron energy Tvůrce(i) Walker, C. (GB)
Frank, Luděk (UPT-D) RID, SAI, ORCID
Müllerová, Ilona (UPT-D) RID, SAI, ORCIDCelkový počet autorů 3 Zdroj.dok. Scanning - ISSN 0161-0457
Roč. 38, č. 6 (2016), s. 802-818Poč.str. 17 s. Forma vydání Tištěná - P Jazyk dok. eng - angličtina Země vyd. US - Spojené státy americké Klíč. slova Monte Carlo modeling ; scanned probe ; computer simulation ; electron-solid interactions ; surface analysis Vědní obor RIV JA - Elektronika a optoelektronika, elektrotechnika CEP TE01020118 GA TA ČR - Technologická agentura ČR LO1212 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy ED0017/01/01 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy Institucionální podpora UPT-D - RVO:68081731 UT WOS 000390267000038 EID SCOPUS 84977104035 DOI 10.1002/sca.21330 Anotace The advent of new imaging technologies in Scanning Electron Microscopy (SEM) using low energy (0-2keV) electrons has brought about new ways to study materials at the nanoscale. It also brings new challenges in terms of understanding electron transport at these energies. In addition, reduction in energy has brought new contrast mechanisms producing images that are sometimes difficult to interpret. This is increasing the push for simulation tools, in particular for low impact energies of electrons. The use of Monte Carlo calculations to simulate the transport of electrons in materials has been undertaken by many authors for several decades. However, inaccuracies associated with the Monte Carlo technique start to grow as the energy is reduced. This is not simply associated with inaccuracies in the knowledge of the scattering cross-sections, but is fundamental to the Monte Carlo technique itself. This is because effects due to the wave nature of the electron and the energy band structure of the target above the vacuum energy level become important and these are properties which are difficult to handle using the Monte Carlo method. In this review we briefly describe the new techniques of scanning low energy electron microscopy and then outline the problems and challenges of trying to understand and quantify the signals that are obtained. The effects of charging and spin polarised measurement are also briefly explored. Pracoviště Ústav přístrojové techniky Kontakt Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178 Rok sběru 2017
Počet záznamů: 1