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Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
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SYSNO ASEP 0362870 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering Tvůrce(i) Vašina, P. (CZ)
Souček, P. (CZ)
Schmidtová, T. (CZ)
Eliáš, M. (CZ)
Buršíková, V. (CZ)
Jílek, M. (CZ)
Jílek Jr., M. (CZ)
Schäfer, C. (DE)
Buršík, Jiří (UFM-A) RID, ORCIDCelkový počet autorů 9 Zdroj.dok. Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, Suppl. 2 (2011), S53-S56Poč.str. 4 s. Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova composite ; mechanical properties ; magnetron Vědní obor RIV BL - Fyzika plazmatu a výboje v plynech CEZ AV0Z20410507 - UFM-A (2005-2011) UT WOS 000293258600011 DOI 10.1016/j.surfcoat.2011.02.038 Anotace Nanocrystalline titanium carbide embedded in an hydrogenated amorphous carbon matrix (nc-TiC/a-C:H)shows high hardness and Young’s modulus together with low friction coefficient. In this paper, we report on the preparation of well adherent (nc-TiC/a-C:H)coatings - 5mm thick on stainless steel substrates using a well balanced magnetic field configuration and only very low power RF bias on the substrate. Hardness and Young’s modulus of this coatings are 43 Gpa and 380 Gpa, respectively. The mechanical properties – hardness and Young’s modulus – measured from the coatings top reach the values obtained at optimized experiments where the unbalanced magnetic field configuration was used. A simple method of depth profiling suitable for evaluation of mechanical properties of several micrometers thick coatings is developed and employed. The paper reports on the depth profile analyses of the coating hardness, Young’s modulus, composition and morphology. Pracoviště Ústav fyziky materiálu Kontakt Yvonna Šrámková, sramkova@ipm.cz, Tel.: 532 290 485 Rok sběru 2012
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