Počet záznamů: 1
Characterization of off-axis single target RF magnetron co-sputtered iron doped tin
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SYSNO ASEP 0353788 Druh ASEP J - Článek v odborném periodiku Zařazení RIV J - Článek v odborném periodiku Poddruh J Článek ve WOS Název Characterization of off-axis single target RF magnetron co-sputtered iron doped tin Tvůrce(i) Kormunda, M. (CZ)
Pavlík, J. (CZ)
Macková, Anna (UJF-V) RID, ORCID, SAI
Malinský, Petr (UJF-V) RID, ORCID, SAICelkový počet autorů 4 Zdroj.dok. Surface and Coatings Technology. - : Elsevier - ISSN 0257-8972
Roč. 205, - (2010), S120-S124Poč.str. 5 s. Jazyk dok. eng - angličtina Země vyd. CH - Švýcarsko Klíč. slova Magnetron co-sputtering ; Off-axis deposition ; Amorphous stannic oxide Vědní obor RIV BL - Fyzika plazmatu a výboje v plynech CEP LC06041 GA MŠMT - Ministerstvo školství, mládeže a tělovýchovy CEZ AV0Z10480505 - UJF-V (2005-2011) UT WOS 000286343200025 DOI 10.1016/j.surfcoat.2010.06.040 Anotace The iron doped SnO2 coatings for sensor applications were studied by AFM, XPS, RBS and XRD techniques. The coatings were deposited by a magnetron sputtering from a single SnO2 target with an iron inset. Two different off-axis deposition arrangements were investigated. The iron concentration in the coating was controlled in the range from 0 up to 5 at.% by two basic external parameters, the fraction of the iron stripe directly in the erosion zone and the RF power. The deposition process was reproducible and deposited substoichiometric Fe:SnO2 films were homogenous, flat, amorphous and thermally stable up to post deposition annealing at 600 °C. The elevated deposition temperatures up to 400 °C and post annealing up to 600 °C for 10 min or 400 °C for 25 h had no significant influence on the composition, the topology and the structure of coatings. The iron dopant in the film has probably α-Fe2O3 bonding structure. Pracoviště Ústav jaderné fyziky Kontakt Markéta Sommerová, sommerova@ujf.cas.cz, Tel.: 266 173 228 Rok sběru 2011
Počet záznamů: 1