Počet záznamů: 1

Scintillation SE detector for variable pressure scanning electron microscopes

SYSNO ASEP	0350812
Druh ASEP	J - Článek v odborném periodiku
Zařazení RIV	J - Článek v odborném periodiku
Poddruh J	Článek ve WOS
Název	Scintillation SE detector for variable pressure scanning electron microscopes
Tvůrce(i)	Jirák, J. (CZ) Neděla, Vilém (UPT-D)_{RID, ORCID, SAI} Černoch, P. (CZ) Čudek, P. (CZ) Runštuk, Jiří (UPT-D)_{RID, SAI, ORCID}
Celkový počet autorů	5
Zdroj.dok.	Journal of Microscopy. - : Wiley - ISSN 0022-2720 Roč. 239, č. 3 (2010), s. 233-238
Poč.str.	6 s.
Jazyk dok.	eng - angličtina
Země vyd.	GB - Velká Británie
Klíč. slova	scintillation detector ; secondary electrons detection ; variable pressure scanning electron
Vědní obor RIV	JA - Elektronika a optoelektronika, elektrotechnika
CEP	GAP102/10/1410 GA ČR - Grantová agentura ČR
CEZ	AV0Z20650511 - UPT-D (2005-2011)
UT WOS	000280994900007
EID SCOPUS	77955763807
DOI	10.1111/j.1365-2818.2010.03377.x
Anotace	We present results obtained with a new scintillation detector of secondary electrons for the variable pressure scanning electron microscope. A detector design is based on the positioning of a single crystal scintillator within a scintillator chamber separated from the specimen chamber by two apertures. This solution enables us to decrease the pressure to several Pa in the scintillator chamber while the pressure in the specimen chamber reaches values of about 1000 Pa (7.5 Torr). Due to decreased pressure, we can apply a potential of the order of several kV to the scintillator, which is necessary for the detection of secondary electrons. Simultaneously, the two apertures at appropriate potentials of the order of several hundreds of volts create an electrostatic lens that allows electrons to pass from the specimen chamber to the scintillator chamber. Results indicate a promising utilization of this detector for a wide range of specimen observations.
Pracoviště	Ústav přístrojové techniky
Kontakt	Martina Šillerová, sillerova@ISIBrno.Cz, Tel.: 541 514 178
Rok sběru	2011

Počet záznamů: 1